Advanced Fabrication Processes for Superconducting Very Large Scale Integrated Circuits

Fabrication Processes for Integrated Circuits

Fabrication Processes for Integrated Circuits

Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation

We describe the recent progress on a Nb nine-layer fabrication process for large-scale single flux quantum (SFQ) circuits. A device fabricated in this process is composed of an active layer including Josephson junctions (JJ) at the top, passive transmission line (PTL) layers in the middle, and a DC power layer at the bottom. We describe the process conditions and the fabrication equipment. We u...

Very Large Scale Integrated Circuitry

Very large scale integrated circuitry is playing a key role in the development of modern electronic systems at APL. In the Microelectronics Group, activities have been focused on creating a resource to ensure that all personnel have access to high-performance, high-reliability integrated circuits. This article describes progress in the design, acquisition, packaging, testing, and insertion of v...

Very-Large-Scale Integration Of Electronic Circuits

This chapter aims to offer the reader a comprehensive view about what we understand nowadays under the term VLSI. Within the Introduction, a historical perspective is given first, describing how the term has evolved from integrated circuits with hundred thousand transistors to integrated systems in the range of billions of devices including on-chip or on-package sensors. Then, the main topics h...